Actuator for Vacuum Chamber
We provide a variety of lifting equipment and systems for Semiconductor and FPD equipment in clean environment.
Customized and/or System Products
Semiconductor, FPD and Medical Equipment
Technology of Linear Actuators Semiconductor, OLED, LCD, Medical …
Specially designed electric linear actuators for clean environment for Semiconductor LCD, OLED and Medical Equipment. We can satisfy customers' needs with a lot of experience and expertise.
Electric Lifter (for clean environment)
We provide a variety of clean lifters according to special environmental, operating load and duty requirements.
Glass Cassette Changer (cassette lifting equipment)
As FPD size increased to generation 8 to 10, our clean type cassette changer lifting systems are being used at many manufacturing lines both in Japan and abroard.
Jack System for Silicon Ingot
Jack system for use to build silicon layer for semiconductor manufacturing. Lifting load 20 ton.
Electric Actuator for Medical Equipment
Specially designed for highly reliable medical equipment.